A Plasma Lens for Magnetron Sputtering
| Title | A Plasma Lens for Magnetron Sputtering |
| Publication Type | Journal Article |
| Year of Publication | 2011 |
| Authors | André Anders, Jeff Brown |
| Journal | IEEE Transactions on Plasma Science |
| Volume | 39 |
| Issue | 11 |
| Pagination | 2528 - 2529 |
| Date Published | 11/2011 |
| ISSN | 0093-3813 |
| Abstract | A plasma lens, consisting of a solenoid and potential-defining ring electrodes, has been placed between a magnetron and substrates to be coated. Photography reveals qualitative information on excitation, ionization, and the transport of plasma to the substrate. |
| DOI | 10.1109/TPS.2011.2157172 |
| Short Title | IEEE Trans. Plasma Sci. |
