Title: Biblio RTF Export
Author: Biblio 7.x

Chan, James S, T.C.  Fu, Nathan W Cheung, Jennifer T Ross, Nathan  Newman, and Michael D Rubin. "Comparison of AIN Films Grown by RF at Magnetron Sputtering and Ion-Assisted Molecular Beam Epitaxy." Materials Research Society. Vol. 300. San Francisco, CA, 1993. LBL-35660.