01188nas a2200145   4500008004100000245007500041210006900116490000700185520069000192100002000882700001900902700002100921700002600942856007400968       2004                        eng d00aCharge-State-Resolved Ion Energy Distributions of Aluminum Vacuum Arcs0 aChargeStateResolved Ion Energy Distributions of Aluminum Vacuum 0 v973 a<p>The charge-state-resolved ion energy distributions of metal ions present in a cathodic arc plasma have been measured and analyzed. Contrary to literature data, lower energies were observed for higher charged ions. The observations were explained by opposing acceleration by pressure gradient and electron-ion coupling, and deceleration by part of the discharge voltage. The distributions were well fitted by shifted Maxwellian distributions, giving additional information on plasma parameters. These results are of importance for an improved understanding of the evolution of ion energy distributions, and is hence instrumental for future progress in thin film growth modelling.</p>1 aRosén, Johanna1 aAnders, André1 aMráz, Stanislav1 aSchneider, Jochen, M.  uhttps://facades.lbl.gov/publications/charge-state-resolved-ion-energy