01322nas a2200157   4500008004100000024001100041245005600052210005500108260001200163300001200175490000600187520085400193100001901047700001901066856007901085       1995                        eng d  aUC-42600aWorking Principle of the Hollow-Anode Plasma Source0 aWorking Principle of the HollowAnode Plasma Source  c11/1995  a571-5750 v43 a<p>The hollow-anode discharge is a special form of glow discharge. It is shown that a drastically reduced anode area is responsible for a positive anode voltage drop of 30-40 V and an increased anode sheath thickness. This leads to ignition of a relatively dense plasma in front of the anode hole. Langmuir probe measurements inside a specially designed hollow anode plasma source give an electron density and temperature of n<sub>e</sub>=10<sup>9</sup>-10<sup>11</sup> cm<sup>-3</sup> and T<sub>e</sub>=1-3 eV, respectively (nitrogen, current 100 mA, flow rate 5-50 scc min<sup>-1</sup>). Driven by a pressure gradient, the 'anode' plasma is blown through the anode hole and forms a bright plasma jet streaming with supersonic velocity (Mach number 1.2). The plasma-stream can be used, for instance, in plasma-assisted deposition of thin films.</p>1 aAnders, André1 aAnders, Simone  uhttps://facades.lbl.gov/publications/working-principle-hollow-anode-plasma