@article {58924, title = {Drifting potential humps in ionization zones: The {\textquotedblleft}propeller blades{\textquotedblright} of high power impulse magnetron sputtering}, journal = {Applied Physics Letters}, volume = {103}, year = {2013}, month = {10/2013}, pages = {144103}, abstract = {

Ion energy distribution functions measured for high power impulse magnetron sputtering show features, such as a broad peak at several 10\ eV with an extended tail, as well as asymmetry with respect to E {\texttimes} B, where E and B are the local electric and magnetic field vectors, respectively. Here it is proposed that those features are due to the formation of a potential hump of several 10\ V in each of the traveling ionization zones. Potential hump formation is associated with a negative-positive-negative space charge that naturally forms in ionization zones driven by energetic drifting electrons.

}, keywords = {Electric fields, ionization, plasma ionization, sputter deposition, sputtering}, issn = {00036951}, doi = {10.1063/1.4823827}, author = {Andr{\'e} Anders and Matjaž Panjan and Robert Franz and Joakim Andersson and Pavel A. Ni} }