@article {11918,
	title = {High quality ZnO:Al transparent conducting oxide films synthesized by pulsed filtered cathodic arc deposition},
	journal = {Thin Solid Films},
	year = {2009},
	abstract = {<p>Aluminum-doped zinc oxide, ZnO:Al or AZO, is a well-known n-type transparent conducting oxide with great potential in a number of applications currently dominated by indium tin oxide (ITO). In this study, the optical and electrical properties of AZO thin films deposited on glass and silicon by pulsed filtered cathodic arc deposition are systematically studied. In contrast to magnetron sputtering, this technique does not produce energetic negative ions, and therefore ion damage can be minimized. The quality of the AZO films strongly depends on the growth temperature while only marginal improvements are obtained with post-deposition annealing. The best films, grown at a temperature of about 200{\textdegree}C, have resistivities in the low to mid 10-4Ω cm range with a transmittance better than 85\% in the visible part of the spectrum. It is remarkable that relatively good films of small thickness (60 nm) can be fabricated using this method.</p>},
	author = {Andr{\'e} Anders and Sunnie H.N. Lim and Kin Man Yu and Joakim Andersson and Johanna Ros{\'e}n and Mike McFarland and Jeff Brown}
}
@article {11614,
	title = {Charge-State-Resolved Ion Energy Distributions of Aluminum Vacuum Arcs},
	journal = {Journal of Applied Physics},
	volume = {97},
	number = {10},
	year = {2004},
	abstract = {<p>The charge-state-resolved ion energy distributions of metal ions present in a cathodic arc plasma have been measured and analyzed. Contrary to literature data, lower energies were observed for higher charged ions. The observations were explained by opposing acceleration by pressure gradient and electron-ion coupling, and deceleration by part of the discharge voltage. The distributions were well fitted by shifted Maxwellian distributions, giving additional information on plasma parameters. These results are of importance for an improved understanding of the evolution of ion energy distributions, and is hence instrumental for future progress in thin film growth modelling.</p>},
	author = {Johanna Ros{\'e}n and Andr{\'e} Anders and Stanislav Mr{\'a}z and Jochen M. Schneider}
}
